Krypton Sputtering of Low Resistivity Tungsten

ABSTRACT

A method of depositing a bilayer of tungsten over tungsten nitride by a plasma sputtering process in which krypton is used as the sputter working gas during the tungsten deposition. Argon may be used as the sputtering working gas during the reactive sputtering deposition of tungsten nitride. The beneficial effect of reduction of tungsten resistivity is increased when the thickness of the tungsten layer is less than 50 nm and further increased when less than 35 nm. The method may be used in forming a gate stack including a polysilicon layer over a gate oxide layer over a silicon gate region of a MOS transistor in which the tungsten nitride acts as a barrier. A plasma sputter chamber in which the invention may be practiced includes gas sources of krypton, argon, and nitrogen.

RELATED APPLICATION

This application is a continuation of Ser. No. 11/841,205, filed Aug.20, 2007, to be issued as U.S. Pat. No. 7,790,604 on Sep. 7, 2010.

FIELD OF THE INVENTION

The invention relates generally to sputter deposition in the formationof semiconductor integrated circuits. In particular, the inventionrelates to sputter deposition of heavy metals.

BACKGROUND ART

The continuing miniaturization of semiconductor integrated circuits hasforced many conventional structures to change and has required theaccompanying need to improve the processes used to create the newstructures. A conventional MOS (metal oxide semiconductor) transistorgate structure for larger feature sizes, illustrated in thecross-sectional view of FIG. 1, includes highly doped source/drain (S/D)regions 10, 12 formed into a lesser doped silicon layer 14, which may beformed epitaxially over a silicon wafer or even in ansilicon-on-insulator (SOI) structure. A thin gate oxide layer 16 may beformed over the entire MOS area, possibly before the implantation andanneal steps for the S/D regions 10, 12. Gate stacks 18 are formed overthe gate oxide layer 16. Conventionally, the gate stacks 18 are formedby sequentially depositing a polysilicon layer 20, a tungsten silicide(WSi_(x)) layer 22, and a silicon nitride (SiN) cap layer 24. In a flashmemory, an oxide-nitride-oxide (ONO) structure may be sandwiched withinthe polysilicon layer 20. S/D holes 26 are then photolithographicallyetched down to the gate oxide layer 16 over the S/D regions 10, 12 todefine the stacks 18. Spacers 28, typically of silicon oxide are thenformed on the sides of the stacks 18. The S/D regions 10, 12 may beimplanted following the formation of the stacks 18 to use the stacks 18as implant masks. Subsequent processing steps open the gate oxide layer16 at the bottom of the S/D holes 26, provide an ohmic contact layer ifnecessary, and fill the S/D holes 26 with polysilicon or a metal toelectrically contact the S/D regions 10, 12. The cap layer 24 is removedto provide electrical contact to the top of the gate oxide layer 16between the S/D regions 10, 12 forming the MOS gate.

This structure was successfully used at the 110 nm node defined by thegate length. However, extending this design to the 90 nm mode has provendifficult. There exists a requirement for a maximum value of the sheetresistance R_(s) of the unpatterned metal layers of the gate stacks 18,that is, the WSi_(x) layer 22 in the structure of FIG. 1. As shown by adotted plot 30 in the graph of FIG. 2, the maximum sheet resistanceR_(s) at 90 nm is about 6 ohms per square. The sheet resistance of alayer decreases with its thickness. The WSi_(x) layer 22 for a gatelength of 90 nm has a sheet resistance varying with the aspect ratio(A/R) of the patterned WSi_(x) layer 22 shown by plot 32. The aspectratio is the ratio of the height to the width of the patterned WSi_(x)layer 22, for which the width is close to the gate length defining thenode size. The graph demonstrates that an aspect ratio of at least 10 isrequired, which translates to a height H of the WSi_(x) layer 22 of atleast 1000 nm at the 90 nm node. Such a structure is not easilymanufactured.

As a result, an alternative gate structure illustrated in thecross-sectional view of FIG. 3 has been developed. Its gate stacks 40include a tungsten nitride (WN) barrier layer 42 and a tungsten (W) vialayer 44. The barrier layer 40 is required to prevent the tungsten vialayer 44 from siliciding with the polysilicon layer 20. Tungsten metalis much more conductive than tungsten silicide. As a result, asillustrated by plot 46 in FIG. 2, the sheet resistance of the W/WN ismuch less than a corresponding thickness of WSi_(x) so that the aspectratio, at least at 90 nm, need be no more than 1, that is, a height H ofabout 105 nm. Another example at the 100 nm node includes 32.5 nm of Wabove 7.5 nm of WN.

Sputtering is the preferred method of depositing the WN barrier layer 42and the W via layer 44 because of the relatively inexpensive equipmentand consumable target, the fast processing available, the capability tosputter both tungsten and tungsten nitride in the same sputter chamberusing a tungsten target and the selective supply of nitrogen gas indepositing the nitride layer. Also, sputtered tungsten tends todemonstrate a lower resistivity and smoother surface than tungstendeposited by chemical vapor deposition (CVD).

An example of a sputter chamber 50 useful for sputtering tungsten andtungsten nitride is schematically illustrated in the cross-sectionalview of FIG. 4. Such a chamber is available from Applied Materials, Inc.of Santa Clara, Calif. as the CleanW sputter chamber. The sputterchamber 50 includes a vacuum chamber 52 arranged about a central axis 54on which a tungsten target 56 is supported through an isolator 58, whichvacuum seals the target 56 to the vacuum chamber 52 and electricallyisolates the target 56 from the electrically grounded vacuum chamber 52.An unillustrated vacuum pump system pumps the interior of the vacuumchamber 52 to a pressure in the low milliTorr range. At least the frontsurface of the tungsten target 56 is planar. The tungsten target 56includes a layer of tungsten facing the interior of the vacuum chamber52 and which typically contains no more than 5 at % of elements otherthan tungsten to provide a source of sputtered tungsten.

A DC power source 60 negatively biases the target to about 600 to 1000VDC with respect to the grounded vacuum chamber 52 or unillustratedgrounded sidewall shield to excite a sputter working gas into a plasma.Conventionally, argon is the sputter working gas and is supplied intothe vacuum chamber 52 from an argon gas source 62 through a mass flowcontroller 64. The target power excites the sputtering working gas intoa plasma and positively charged ions ofthe plasma are acceleratedtowards the target 54 and sputter tungsten atoms from it. The density ofthe plasma is increased by placing in back of the target 56 a magnetron66 having an inner magnetic pole 68 of one magnetic polarity surroundedby an outer magnetic pole 70 of the opposed magnetic polarity. The poles68, 70 project a magnetic field into the vacuum chamber 52 parallel tothe face of the target 56 to trap electrons and hence increase theplasma density and the resultant sputtering rate. To improve thesputtering uniformity and target utilization, the magnetic poles 68, 70are asymmetric about the central axis 54 but supported on an arm 72connected to a shaft 74 extending along the central axis 54. A motor 76rotates the shaft 74 and hence the magnetron 66 about the central axis54 to provide at least azimuthal uniformity. A pedestal 80 within thevacuum chamber 52 supports a wafer 82 or other substrate in oppositionto the target 56 to be coated with the tungsten sputtered from thetarget 56. A wafer is generally planar and circular except for alignmentindicia. Optionally, an RF power source 84 biases the pedestal 80through a capacitive coupling circuit 86. The pedestal 80 is conductiveso that it acts as an electrode. The RF bias in the presence of a plasmawithin the vacuum chamber 52 causes a negative DC self-bias to developon the pedestal 80 so that sputtered tungsten ions are acceleratedtowards the wafer 82 and their trajectories enter deep within any highaspect-ratio holes formed in the wafer 82.

The same sputter chamber 50 may be used to sputter deposit tungstennitride (WN) in a reactive sputtering process. Nitrogen is selectivelyadmitted into the vacuum chamber 52 from a nitrogen gas source 90through a mass flow controller 92. The nitrogen reacts with thesputtered tungsten to form a layer of tungsten nitride on the surface ofthe wafer 82.

However, as the gate lengths further decrease towards the 35nm node, theresistivity of the sputtered tungsten continues to be a problem.

SUMMARY OF THE INVENTION

One aspect of the invention includes a conductive barrier layeroverlying a silicon layer including a tungsten nitride barrier layeroverlain by a tungsten layer in which the tungsten layer is deposited byplasma sputtering using krypton as the sputter working gas. Theinvention is particularly useful when the thickness of the tungstenlayer is less than 50 nm, and even more useful when less than 35 nm. Thetungsten nitride barrier layer may be reactively sputtered in the samesputter chamber using argon as the sputter working gas.

Another aspect of the invention includes a method of forming a gatestack structure for MOS transistors in which a polysilicon layeroverlies a gate oxide layer overlying a silicon gate region. The gatestructure further includes a tungsten-based structure including atungsten via layer and a tungsten nitride barrier layer intermediate thetungsten via layer and the polysilicon layer in which the tungsten vialayer is deposited by plasma sputtering using krypton as the sputterworking gas.

The invention further includes a plasma sputter chamber including atungsten target and metered sources of argon, krypton, and nitrogen.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a cross-sectional view of a MOS gate stack using a tungstensilicide gate electrode layer.

FIG. 2 is a graph illustrating the required aspect ratio of the gateelectrode layer for tungsten silicide and tungsten.

FIG. 3 is a cross-sectional view of a MOS gate stack using a gateelectrode layer of tungsten with a tungsten nitride barrier.

FIG. 4 is a schematic cross-sectional view of a sputter chamber usablefor sputtering tungsten according to the invention.

FIG. 5 is a graph illustrating the dependence of electrical resistivityfor tungsten sputter deposited using alternatively argon and krypton asthe sputter working gas.

FIG. 6 is a graph illustrating the dependence of electrical sheetresistance for tungsten sputter deposited on tungsten nitride usingalternatively argon and krypton as the sputter working gas.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

We have observed that the resistivity of a sputtered tungsten layertends to increase for thicknesses below about 50 nm. The increase isbelieved to arise from electron scattering at the film surface. When thetungsten is sputtered using argon as the sputtering gas, as illustratedin plots 100, 102 in the graph of FIG. 5 for two different flows ofargon, at thicknesses less than about 100 nm, the tungsten resistivityincreases from more bulk values of 10 microohm-cm to nearly 13microohm-cm at a thickness of about 12 nm. The resistivity differssomewhat with the amount of argon supplied, but the difference isrelatively small.

However, according to one aspect of the invention, the sputter workinggas is krypton rather than argon. As illustrated in FIG. 4, the kryptonis supplied into the vacuum chamber 52 from a krypton gas source 110through a mass flow controller 112. As shown in plot 114 in FIG. 5, theresistivity of a krypton-deposited tungsten layer is generally less thanthat of the argon-deposited tungsten layer and the resistivity increasesat a much reduced rate as the thicknesses are reduced below 100 nm. Inparticular, the bulk resistivity value of about 10 microohm-cm ismaintained but the resistivity at 12 nm increases only to about 11microohm-cm. A possible explanation for the different resistivity isthat krypton ions are much heavier than argon ions and transfer moreenergy to tungsten atoms in the sputtering process. The more energeticsputtered tungsten atoms are believed to promote larger grain sizes infilm growth. In both cases, the tungsten layer was deposited on a 100nm-thick oxide layer.

For system performance, an important parameter of a tungsten gate stackis the sheet resistance of tungsten sputter deposited on tungstennitride. A comparative experiment was performed in which varyingthicknesses of W were reactively sputtered onto WN using conventionalsputter working gas of argon. The measured sheet resistances of a planarlayer are shown in plot 116 of the graph of FIG. 5 for the WN/W bilayersputter deposited using argon as the sputter working gas. As expected,the sheet resistance increases with decreasing thickness. However, theincrease from a 100nm thickness to a 25 nm thickness is much greaterthan the fact or of four resulting from the geometry.

However, if the tungsten layer is sputter deposited using kryptoninstead of argon as the sputter working gas, the sheet resistance, asshown in plot 118, is less than when argon is the sputter working gas.The reduction of sheet resistance is more pronounced at the smallerthicknesses.

In the experiments from which the krypton sputtering data of plot 108were derived, argon continued to be used as the sputter working gas inthe reactive sputtering of tungsten nitride. It is expected that kryptonwould work equally effectively in sputter depositing the nitride.However, krypton is much more expensive than the conventional argon and,further, the resistivity of the nitride barrier layer does not seem tobe a significant issue. As a result, in this aspect of the invention,the tungsten nitride is deposited by flowing argon and nitrogen into thesputter chamber. The relative flows of argon and nitrogen determine thecomposition WN_(x) of the tungsten nitride layer. A typical compositionmay be W₆₄N₃₅ with a small fraction of included Ar. Once the desirednitride thickness is attained, the nitrogen flow is stopped and kryptonreplaces argon as the sputter working gas. It is appreciated that thekrypton and argon flows need not be abruptly and completely switched.For example, during the metal deposition, a lesser amount of argon thanof krypton may be flowed into the chamber. It is also possible that somekrypton is used in the nitride deposition, but such a procedure would beeconomically disadvantageous.

For a gate stack, the presently preferred thickness of the tungsten filmis between 20 and 50 nm with the effects of the invention being mostapparent for thicknesses less than 35 nm. The tungsten sputtering may beperformed with a target power of 4 kW, a sputter gas flow of 45 to 90sccm, and a pedestal heater temperature of 200° C. A deposition time of20 s produces a tungsten film of about 50 nm thickness.

Sputtered tungsten may also be used to form a bit line in the MOSstructure of FIG. 2 when implemented in a memory. However, bit linestend to be much thicker than stack vias, typically around 100 nm andgreater The data of FIGS. 5 and 6 show no particular advantage forkrypton sputtering at 100 nm. However, at 50 nm and below, kryptonsputtering offers clear advantages. At the 35 nm node, gate stack viathicknesses of 35 nm and less are being planned. In this region, kryptonsputtering offers clear advantages.

The invention thus provides for increased performance of gate stacks andother integrated circuit structures with only minor modifications ofexisting processes and processing chambers.

1. A method of sputter depositing a tungsten structure in an integratedcircuit, comprising the steps of: providing a plasma sputter chamberincluding a tungsten target and a pedestal for supporting a substrate tobe sputter deposited in opposition to the target; a first step ofdepositing a barrier layer on the substrate without the use ofkrypton;and a subsequent second step of flowing krypton into the chamber andexciting it into a plasma to deposit a tungsten layer on the barrierlayer.
 2. The method of claim 1, wherein the tungsten layer has athickness of less than 100 nm.
 3. The method of claim 1, wherein thethis is less than 50 nm.
 4. The method of claim 3, wherein the tungstenlayer has a thickness of less than 35 nm.
 5. The method of claim 1,wherein the thickness is greater than 20 nm.
 6. The method of claim 1,wherein a resistivity of the tungsten layer would be higher if onlyargon were used in the second step as the sputter working gas.
 7. Themethod of claim 1, wherein the first step includes flowing argon and noeffective amount of sputter gas other than argon into the chamber andexciting it into a plasma while also flowing nitrogen into the chamberto deposit the barrier layer comprising tungsten nitride.
 8. A method ofsputter depositing a tungsten structure to form a gate stack in a MOSstructure, comprising the steps of: disposing within a plasma sputterchamber having a tungsten target a substrate containing a polysiliconlayer on its surface overlying a gate oxide layer overlying a siliconlayer; a first step of barrier layer over the polysilicon layer withoutthe use of krypton; and a second step of admitting krypton into thechamber to deposit a tungsten layer over the barrier layer.
 9. Themethod of claim 8, wherein the tungsten layer has a thickness of no morethan 100 nm.
 10. The method of claim 9, wherein the thickness is no morethan 35 nm.
 11. The method of claim 10, wherein the thickness is morethan 20 nm.
 12. The method of claim 8, wherein more argon is admittedinto the chamber in the first step than in the second step.
 13. Themethod of claim 8, wherein the first step includes flowing into thechamber nitrogen and a sputter working gas consisting of argon and noeffective amount of sputter gas other than argon and exciting to therebydeposit the barrier layer layer comprising tungsten nitride.
 14. Amethod of forming an integrated circuit structure including sputterdepositing a tungsten structure onto a substrate practiced in a plasmasputter chamber including a target comprising tungsten and a pedestalfor supporting the substrate in opposition to the target, comprising thesteps of: a first step of flowing a first gas consisting of argon andnitrogen into the chamber and exciting it into a first plasma to deposita tungsten nitride layer on the substrate; and a second step of flowinga second gas comprising krypton into the chamber and exciting it into asecond plasma to deposit a tungsten layer on the tungsten nitride layer.15. A method of sputter depositing a tungsten structure in an integratedcircuit, comprising the steps of: providing a plasma sputter chamberincluding a target comprising tungsten and a pedestal for supporting asubstrate to be sputter deposited in opposition to the target; a firststep of flowing a sputter gas containing no effective amount of a gasother than argon into the chamber and exciting the it into a plasmawhile also flowing nitrogen into the chamber to deposit a barrier layercomprising tungsten nitride on the substrate; and a subsequent secondstep of flowing krypton into the chamber and exciting it into a plasmato deposit a conductive layer comprising tungsten on the barrier layer.16. The method of claim 15, wherein the conductive layer has a thicknessof no more than 100 nm.